A micro-fabrication tool for automatic large-area patterning using polymer pen lithography

In this work, we develop an automatic apparatus that can easily control a 2-dimensional probe array for micro-fabrication in over-centimeter-scaled area. A window-frame-like structure is fabricated to observe a gapped angle between the probe array and the sample for monitoring with a computer. For the automatic patterning process in a large area, a LabVIEW-software-based 5-axis control system is established. Polymer pen lithography (PPL) is carried out on an Au substrate to examine the performance of the established apparatus. A 2D pen array made of polydimethylsiloxane (PDMS) is used for the patterning process. As a result, more than a thousand Au micro-structures can be successfully obtained in a centimeter-scaled area by using the apparatus.