A novel pull-up type RF MEMS switch with low actuation voltage

Seong Dae Lee, Byoung Chul Jun, Sam Dong Kim, Jin Koo Rhee

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

We report a novel pull-up type radio frequency (RF) microelectromechanical system (MEMS) switch with no elastic deformation of the cantilever involved in the actuation. At a voltage of 4.5 V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic force to make contact with the upper pad. At a frequency of 50 GHz, an insertion loss of 0.5 dB, a return loss of 12.4 dB, and an isolation of 55 dB are obtained from the switch. The measured transient times for switch-on and switch-off are 120 and 130 ns, respectively. Compared to the MEMS switches reported thus far, the pull-up type switch shows the best switching speed and isolation characteristic at 50 GHz.

Original languageEnglish
Pages (from-to)856-858
Number of pages3
JournalIEEE Microwave and Wireless Components Letters
Volume15
Issue number12
DOIs
StatePublished - Dec 2005

Keywords

  • High isolation
  • Low actuation voltage
  • Microelectromechanical system (MEMS) switch
  • Pull-up

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