Abstract
We report a novel pull-up type radio frequency (RF) microelectromechanical system (MEMS) switch with no elastic deformation of the cantilever involved in the actuation. At a voltage of 4.5 V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic force to make contact with the upper pad. At a frequency of 50 GHz, an insertion loss of 0.5 dB, a return loss of 12.4 dB, and an isolation of 55 dB are obtained from the switch. The measured transient times for switch-on and switch-off are 120 and 130 ns, respectively. Compared to the MEMS switches reported thus far, the pull-up type switch shows the best switching speed and isolation characteristic at 50 GHz.
Original language | English |
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Pages (from-to) | 856-858 |
Number of pages | 3 |
Journal | IEEE Microwave and Wireless Components Letters |
Volume | 15 |
Issue number | 12 |
DOIs | |
State | Published - Dec 2005 |
Keywords
- High isolation
- Low actuation voltage
- Microelectromechanical system (MEMS) switch
- Pull-up