A novel pull-up type RF MEMS switch with low actuation voltage

We report a novel pull-up type radio frequency (RF) microelectromechanical system (MEMS) switch with no elastic deformation of the cantilever involved in the actuation. At a voltage of 4.5 V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic force to make contact with the upper pad. At a frequency of 50 GHz, an insertion loss of 0.5 dB, a return loss of 12.4 dB, and an isolation of 55 dB are obtained from the switch. The measured transient times for switch-on and switch-off are 120 and 130 ns, respectively. Compared to the MEMS switches reported thus far, the pull-up type switch shows the best switching speed and isolation characteristic at 50 GHz.