All solution-processed high-resolution bottom-contact transparent metal-oxide thin film transistors

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Abstract

We report all solution-processed high-resolution bottom-contact indium-gallium-zinc-oxide (IGZO) thin film transistors (TFTs) using a simple surface patterning and dip-casting process. High-resolution nanoparticulate Ag source/drain electrodes and a sol-gel processed IGZO semiconductor were deposited by a simple dip-casting along with a photoresist-free, non-relief-pattern lithographic process. The deposited Ag and IGZO solution can be steered into the desired hydrophilic areas by a low surface energy self-assembled monolayer, resulting in source/drain electrodes and semiconducting layer, respectively. The all solution-processed bottom-contact IGZO TFTs including a channel length of 10 νm typically showed a mobility range 0.05-0.2 cm2 V-1 s-1 with an on/off ratio of more than 106.

Original languageEnglish
Article number125102
JournalJournal Physics D: Applied Physics
Volume42
Issue number12
DOIs
StatePublished - 2009

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