@inproceedings{765bb9763d1440be8ca9a028c73c5251,
title = "An interdigital BST capacitor with high tunability and low loss tangent",
abstract = "In this paper, a Ba0.6Sr0.4TiO3 (BST) interdigital capacitor on MgO sustrate which allows for a low loss tangent while maintaining high tunability at low bias voltages is presented. The interdigital capacitors with a 50 μm gap and different doped materials of BST thin film are characterized. The tunability of 11.2 % and 28 % are obtained for the undoped BST thin film and for the Mn doped (3 mol %) BST thin film, respectively, at 3.5 GHz and bias voltage of 20 V. Furthermore, loss tangent of the BST thin film is found to be approximately 0.00845 and decreased with Mn doping. Mn doped (3 mol %) BST film is suggested to be an effective candidate for high performance tunable device applications.",
keywords = "BaSrTiO, Ferroelectric, Interdigital Capacitor, Tunable capacitor",
author = "Kim, {Ki Byoung} and Yun, {Tae Soon} and Kim, {Hyun Suk} and Kim, {Ran Young} and Kim, {Ho Gi} and Lee, {Jong Chul}",
year = "2004",
language = "English",
isbn = "1580539920",
series = "Conference Proceedings- European Microwave Conference",
pages = "161--164",
booktitle = "Conference Proceedings- 34th European Microwave Conference",
note = "Conference Proceedings- 34th European Microwave Conference ; Conference date: 12-10-2004 Through 14-10-2004",
}