Anion control as a strategy to achieve high-mobility and high-stability oxide thin-film transistors

Hyun Suk Kim, Sang Ho Jeon, Joon Seok Park, Tae Sang Kim, Kyoung Seok Son, Jong Baek Seon, Seok Jun Seo, Sun Jae Kim, Eunha Lee, Jae Gwan Chung, Hyungik Lee, Seungwu Han, Myungkwan Ryu, Sang Yoon Lee, Kinam Kim

Research output: Contribution to journalArticlepeer-review

155 Scopus citations

Abstract

Ultra-definition, large-area displays with three-dimensional visual effects represent megatrend in the current/future display industry. On the hardware level, such a "dream" display requires faster pixel switching and higher driving current, which in turn necessitate thin-film transistors (TFTs) with high mobility. Amorphous oxide semiconductors (AOS) such as In-Ga-Zn-O are poised to enable such TFTs, but the trade-off between device performance and stability under illumination critically limits their usability, which is related to the hampered electron-hole recombination caused by the oxygen vacancies. Here we have improved the illumination stability by substituting oxygen with nitrogen in ZnO, which may deactivate oxygen vacancies by raising valence bands above the defect levels. Indeed, the stability under illumination and electrical bias is superior to that of previous AOS-based TFTs. By achieving both mobility and stability, it is highly expected that the present ZnON TFTs will be extensively deployed in next-generation flat-panel displays.

Original languageEnglish
Article number1459
JournalScientific Reports
Volume3
DOIs
StatePublished - 2013

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