Abstract
This paper reports bipolar resistive-switching (RS) characteristics and its mechanism observed from Pt/ZrN/Ti capacitors. This ZrN-based RS memory (RSM) shows excellent program/erase behavior under +3 V/10 ns and -3 V/10 ns with a high-to-low resistance ratio of > 104. The device also showed an endurance of > 109 cycles and a retention time of > 10 4s at 85 °C. The temperature-dependent studies of on/off states show that metallic conduction is responsible for on state, whereas semiconducting or insulating behaviors are clearly observed from off -state devices. These results show that ZrN-based RSM can be used as a promising RSM device.
Original language | English |
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Article number | 6403533 |
Pages (from-to) | 252-257 |
Number of pages | 6 |
Journal | IEEE Transactions on Device and Materials Reliability |
Volume | 13 |
Issue number | 1 |
DOIs | |
State | Published - 2013 |
Keywords
- Atomic force microscopy (AFM)
- resistive switching (RS)
- SCLC
- ZrN