BST interdigital capacitors with high tunability on MgO substrate

Ki Byoung Kim, Tae Soon Yun, Ran Young Kim, Hyun Suk Kim, Ho Gi Kim, Jong Chul Lee

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Abstract

In this paper, Au/Ba0.6Sr0.4TiO3 (BST) ferroelectric thin-film interdigital capacitors on MgO substrate are presented. The interdigital capacitors with a 50-μm gap and different doped materials of BST thin film are characterized. Tunability rates of 11.2% and 28% are obtained for the undoped BST thin film and the Mn-doped (3 mol %) BST thin film, respectively, at 3.5 GHz with a bias voltage of 20 V. Furthermore, the loss tangent of the BST thin film is found to be approximately 0.0158 and it decreases with Mn doping. Mn-doped (3 mol %) BST film is suggested to be an effective candidate for high-performance tunable device applications.

Original languageEnglish
Pages (from-to)15-18
Number of pages4
JournalMicrowave and Optical Technology Letters
Volume45
Issue number1
DOIs
StatePublished - 5 Apr 2005

Keywords

  • BaSrTiO
  • Ferroelectric
  • Interdigital capacitor
  • Tunable capacitor

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