Abstract
In this paper, Au/Ba0.6Sr0.4TiO3 (BST) ferroelectric thin-film interdigital capacitors on MgO substrate are presented. The interdigital capacitors with a 50-μm gap and different doped materials of BST thin film are characterized. Tunability rates of 11.2% and 28% are obtained for the undoped BST thin film and the Mn-doped (3 mol %) BST thin film, respectively, at 3.5 GHz with a bias voltage of 20 V. Furthermore, the loss tangent of the BST thin film is found to be approximately 0.0158 and it decreases with Mn doping. Mn-doped (3 mol %) BST film is suggested to be an effective candidate for high-performance tunable device applications.
| Original language | English |
|---|---|
| Pages (from-to) | 15-18 |
| Number of pages | 4 |
| Journal | Microwave and Optical Technology Letters |
| Volume | 45 |
| Issue number | 1 |
| DOIs | |
| State | Published - 5 Apr 2005 |
Keywords
- BaSrTiO
- Ferroelectric
- Interdigital capacitor
- Tunable capacitor
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