Catalytic Metal-Accelerated Crystallization of High-Performance Solution-Processed Earth-Abundant Metal Oxide Semiconductors

Jae Cheol Shin, Sung Min Kwon, Jingu Kang, Seong Pil Jeon, Jae Sang Heo, Yong Hoon Kim, Yong Hoon Kim, Sung Woon Cho, Sung Kyu Park

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

As an alternative strategy for conventional high-temperature crystallization of metal oxide (MO) channel layers, the catalytic metal-accelerated crystallization (CMAC) process using a metal seed layer is demonstrated for low-temperature crystallization of solution-processed MO semiconductors. In the CMAC process, the catalytic metal layer plays the role of seed sites for initiating and accelerating the crystallization of amorphous MO films. Generally, the solution-processed crystalline-TiO2 (c-TiO2) films required high-temperature crystallization conditions (≥500-600 °C), showing low electrical performance with a high defect density. In contrast, the suggested CMAC process could effectively lower crystallization temperature of the a-TiO2 films, enabling high-quality c-TiO2 films with well-aligned anatase grains and low-defect density. The various crystalline catalytic layers were deposited over the earth-abundant n-type amorphous titanium oxide (a-TiO2) films. Also, then, the CMAC process was performed for facile low-temperature translation of solution-processed a-TiO2 to a highly crystallized state. In particular, the Al-CMAC process using the crystalline thin-aluminum (Al) catalytic metal seed layer facilitates low-temperature (≥300 °C) crystallization of the solution-processed a-TiO2 films and the fabrication of high-performance solution-processed c-TiO2 thin-film transistors with superior field-effect mobility, good on/off switching behavior, and improved operational stability.

Original languageEnglish
Pages (from-to)25000-25010
Number of pages11
JournalACS Applied Materials and Interfaces
Volume12
Issue number22
DOIs
StatePublished - 3 Jun 2020

Keywords

  • catalytic metals-accelerated crystallization
  • low-temperature crystallization
  • solution-processed metal oxide
  • thin-film transistor
  • titanium oxide

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