Changes in Gd2O3 films grown on Si(100) as a function of nitridation temperature and Zr incorporation

  • W. J. Lee
  • , M. H. Cho
  • , Y. K. Kim
  • , J. H. Baeck
  • , I. S. Jeong
  • , K. Jeong
  • , K. B. Chung
  • , S. Y. Kim
  • , D. H. Ko

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4 Scopus citations

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