Characteristics of HfO 2 thin films grown by plasma atomic layer deposition

  • Jinwoo Kim
  • , Seokhoon Kim
  • , Hyeongtag Jeon
  • , M. H. Cho
  • , K. B. Chung
  • , Choelhwyi Bae

Research output: Contribution to journal › Article › peer-review

75 Scopus citations

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