TY - GEN
T1 - Characterization of indium tin oxide (ITO) thin film fabricated by indium-tin-organic sol including ITO nanoparticle
AU - Hong, Sung Jei
AU - Han, Jeong In
PY - 2007
Y1 - 2007
N2 - In this paper, indium tin oxide (ITO) thin film was fabricated by indium-tin- organic sol including ITO nanoparticle, and optical transmittance was characterized.. ITO nanoparticle was designed to dope 10wt% SnO2 into In2O3 lattice, and was synthesized under low temperature not exceeding 300°C in order to make ultrafine sized particle. As a result, the synthesized ITO nanoparticle showed ultrafine size about 5 nm and high specific surface area of 117 m2/g.. Also, (222) preferred orientation was observed from X-ray diffracted peak. Then, using the particles and indium-tin-organic sol, ITO thin film was fabricated. The indium-tin-organic sol was made using organic solution in which indium and tin acetic reagents were dissolved into an organic solvent. The ITO nanoparticle was included into indium-tin-organic sol in order to deposit ITO sol thin film by spin coating. The ITO mixture sol was spin-coated on a glass substrate of which area was 7×7 cm, and heat-treated at 500°C. As a result, the optimized ITO sol-gel thin film could be successfully fabricated with good optical transmittance over 83% and electrical resistance less than 7×10 3 Ω by including the 0.6wt% ITO nanoparticle into the ITO sol..
AB - In this paper, indium tin oxide (ITO) thin film was fabricated by indium-tin- organic sol including ITO nanoparticle, and optical transmittance was characterized.. ITO nanoparticle was designed to dope 10wt% SnO2 into In2O3 lattice, and was synthesized under low temperature not exceeding 300°C in order to make ultrafine sized particle. As a result, the synthesized ITO nanoparticle showed ultrafine size about 5 nm and high specific surface area of 117 m2/g.. Also, (222) preferred orientation was observed from X-ray diffracted peak. Then, using the particles and indium-tin-organic sol, ITO thin film was fabricated. The indium-tin-organic sol was made using organic solution in which indium and tin acetic reagents were dissolved into an organic solvent. The ITO nanoparticle was included into indium-tin-organic sol in order to deposit ITO sol thin film by spin coating. The ITO mixture sol was spin-coated on a glass substrate of which area was 7×7 cm, and heat-treated at 500°C. As a result, the optimized ITO sol-gel thin film could be successfully fabricated with good optical transmittance over 83% and electrical resistance less than 7×10 3 Ω by including the 0.6wt% ITO nanoparticle into the ITO sol..
KW - Electrical resistance
KW - ITO
KW - Nanoparticle
KW - Optical transmittance
KW - Sol
KW - Thin film
UR - http://www.scopus.com/inward/record.url?scp=38549095065&partnerID=8YFLogxK
U2 - 10.4028/3-908451-30-2.877
DO - 10.4028/3-908451-30-2.877
M3 - Conference contribution
AN - SCOPUS:38549095065
SN - 3908451302
SN - 9783908451303
T3 - Solid State Phenomena
SP - 877
EP - 884
BT - Nanoscience and Technology
PB - Trans Tech Publications Ltd
T2 - China International Conference on Nanoscience and Technology, ChinaNANO 2005
Y2 - 9 June 2005 through 11 June 2005
ER -