Characterization of indium tin oxide (ITO) thin film fabricated by indium-tin-organic sol including ITO nanoparticle

Sung Jei Hong, Jeong In Han

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, indium tin oxide (ITO) thin film was fabricated by indium-tin- organic sol including ITO nanoparticle, and optical transmittance was characterized.. ITO nanoparticle was designed to dope 10wt% SnO2 into In2O3 lattice, and was synthesized under low temperature not exceeding 300°C in order to make ultrafine sized particle. As a result, the synthesized ITO nanoparticle showed ultrafine size about 5 nm and high specific surface area of 117 m2/g.. Also, (222) preferred orientation was observed from X-ray diffracted peak. Then, using the particles and indium-tin-organic sol, ITO thin film was fabricated. The indium-tin-organic sol was made using organic solution in which indium and tin acetic reagents were dissolved into an organic solvent. The ITO nanoparticle was included into indium-tin-organic sol in order to deposit ITO sol thin film by spin coating. The ITO mixture sol was spin-coated on a glass substrate of which area was 7×7 cm, and heat-treated at 500°C. As a result, the optimized ITO sol-gel thin film could be successfully fabricated with good optical transmittance over 83% and electrical resistance less than 7×10 3 Ω by including the 0.6wt% ITO nanoparticle into the ITO sol..

Original languageEnglish
Title of host publicationNanoscience and Technology
PublisherTrans Tech Publications Ltd
Pages877-884
Number of pages8
EditionPART 2
ISBN (Print)3908451302, 9783908451303
DOIs
StatePublished - 2007
EventChina International Conference on Nanoscience and Technology, ChinaNANO 2005 - Beijing, China
Duration: 9 Jun 200511 Jun 2005

Publication series

NameSolid State Phenomena
NumberPART 2
Volume121-123
ISSN (Print)1012-0394

Conference

ConferenceChina International Conference on Nanoscience and Technology, ChinaNANO 2005
Country/TerritoryChina
CityBeijing
Period9/06/0511/06/05

Keywords

  • Electrical resistance
  • ITO
  • Nanoparticle
  • Optical transmittance
  • Sol
  • Thin film

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