Characterization of RF sputter deposited HfAlOx dielectrics for MIM capacitor applications

  • M. K. Hota
  • , C. Mahata
  • , S. Mallik
  • , B. Majhi
  • , T. Das
  • , C. K. Sarkar
  • , C. K. Maiti

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Fingerprint

Dive into the research topics of 'Characterization of RF sputter deposited HfAlOx dielectrics for MIM capacitor applications'. Together they form a unique fingerprint.

Material Science

Engineering