Characterization of RF sputter deposited HfAlOx dielectrics for MIM capacitor applications

M. K. Hota, C. Mahata, S. Mallik, B. Majhi, T. Das, C. K. Sarkar, C. K. Maiti

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

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