Abstract
In this work, sensitivity of a nanocrystalline tin oxide gas sensitive thick film was successfully enhanced by controlling its resistance. For the precise control of the resistance, low temperature catalyst doping (LTCD) method was applied below 300°C to dope Pt catalyst onto nanocrystalline tin oxide particle. Also, a gas sensitive thick film was fabricated using the nanocrystalline tin oxide particle having a size smaller than 10 nm, and it led to an enhanced sensitivity with respect to the methane gas. That is, a good and stable sensitivity (R3500/R1000) of 0.64 was achieved after aging for 5 hours at 400°C by doping with 5wt% of Pt catalyst onto the tin oxide particle.
Original language | English |
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Pages | 689-692 |
Number of pages | 4 |
State | Published - 2004 |
Event | IEEE Sensors 2004 - Vienna, Austria Duration: 24 Oct 2004 → 27 Oct 2004 |
Conference
Conference | IEEE Sensors 2004 |
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Country/Territory | Austria |
City | Vienna |
Period | 24/10/04 → 27/10/04 |
Keywords
- Gas sensitive thick film
- Nanocrystalline
- Tin oxide