Coupled self-assembled monolayer for enhancement of Cu diffusion barrier and adhesion properties
- Yongwon Chung
- , Sanggeun Lee
- , Chandreswar Mahata
- , Jungmok Seo
- , Seung Min Lim
- , Min Su Jeong
- , Hanearl Jung
- , Young Chang Joo
- , Young Bae Park
- , Hyungjun Kim
- , Taeyoon Lee
- Yonsei University
- Seoul National University
- Andong National University
Research output: Contribution to journal › Article › peer-review
30
Scopus
citations