Defect control in zinc oxynitride semiconductor for high-performance and high-stability thin-film transistors

Hyun Suk Kim, Joon Seok Park, Tae Sang Kim, Kyoung Seok Son, Jong Baek Seon, Seok Jun Seo, Sun Jae Kim, Sun Hee Lee, Eok Su Kim, Myoung Kwan Ryu, Seung Wu Han, Seong Ho Cho, Young Soo Park

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

8 Scopus citations

Abstract

The fabrication of thin-film transistor devices incorporating active semiconductors based on zinc oxynitride (ZnON) compound is presented. It is demonstrated that the addition of appropriate dopant, gallium, in ZnON, suppresses the formation of shallow donor, nitrogen vacancies, and significantly improves electrical characteristics of the resulting TFT. The Ga:ZnON devices with field-effect mobility values exceeding 50 cm2/Vs are achieved, which makes them suitable as switching or driving elements in next-generation flat-panel displays.

Original languageEnglish
Title of host publicationGettering and Defect Engineering in Semiconductor Technology XV
PublisherTrans Tech Publications Ltd
Pages446-450
Number of pages5
ISBN (Print)9783037858240
DOIs
StatePublished - 2014
Event15th Gettering and Defect Engineering in Semiconductor Technology, GADEST 2013 - Oxford, United Kingdom
Duration: 22 Sep 201327 Sep 2013

Publication series

NameSolid State Phenomena
Volume205-206
ISSN (Print)1012-0394

Conference

Conference15th Gettering and Defect Engineering in Semiconductor Technology, GADEST 2013
Country/TerritoryUnited Kingdom
CityOxford
Period22/09/1327/09/13

Keywords

  • First-principles calculation
  • Flat panel display
  • Oxynitride
  • TFT

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