@inproceedings{73aae54fe8474df3a540032a93265667,
title = "Degradation behavior of TaYOx-based metal-insulator-metal capacitors",
abstract = "Characteristics under constant voltage stress from 5 V to 7 V were carried out to monitor the degradation behavior of TaYOx dielectric layers. It is found that capacitance and the voltage at maximum capacitance gradually increase during constant voltage stressing. However, the leakage current density remains almost constant with the injected charge for a certain period of time.",
author = "Hota, {M. K.} and C. Mahata and S. Mallik and Sarkar, {C. K.} and Maiti, {C. K.}",
year = "2010",
doi = "10.1109/IPFA.2010.5531974",
language = "English",
isbn = "9781424455973",
series = "Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA",
booktitle = "IPFA 2010 - 17th International Symposium on the Physical and Failure Analysis of Integrated Circuits",
note = "17th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2010 ; Conference date: 05-07-2010 Through 09-07-2010",
}