Determination of the electron collision cross sections for the C₂H₄ molecule by using the electron swarm method

A set of low-energy electron-collision cross sections for ethene (C₂H₄) is necessary for quantitative numerical modeling of plasma discharges for processing procedures with materials containing C₂H₄ molecules. The set was derived from the measured electron transport coefficients for a pure C₂H₄ molecule by using an electron swarm study and a two-term approximation to the Boltzmann equation for energy. The electron transport coefficients, which were calculated by using the derived set, are in good agreement with the experimental values over a wide range of E/N ratios in pure C₂H₄ molecule, where E is the electric field and N is the neutral number density. The validity of the present set of the C₂H₄ molecule was not only checked by using a Monte Carlo simulation but also evaluated by comparison with another set.