Abstract
An electron collision cross-section is necessary for modeling electron diffusion in a plasma reactor. We have determined the electron collision cross-sections included with the momentum transfer cross-section for Cl2 molecule. The electron drift velocities have been calculated in a 20% Cl2-He mixture and in pure Cl2 by using the determined cross-sections and a two-term approximation of the Boltzmann equation for the energy. The results agree well with available experimental data for the electron drift velocity over a wide range of reduced electric fields, E/N (ratio of the electric field, E, to the neutral number density N). The present cross-sections may be important for quantitatively modeling of related plasmas.
Original language | English |
---|---|
Pages (from-to) | 1224-1228 |
Number of pages | 5 |
Journal | Journal of the Korean Physical Society |
Volume | 57 |
Issue number | 5 |
DOIs | |
State | Published - 15 Nov 2010 |
Keywords
- Boltzmann equation analysis
- Chlorine
- Electron collision cross-section
- Electron drift velocity
- Electron swarm method
- Momentum transfer cross-section
- Plasma discharge simulation