Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes

J. I. Lee, S. Pyo, M. O. Kim, T. Chung, H. K. Lee, S. C. Lim, J. Park, J. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

We have developed a novel three dimensional tactile sensor based on vertically aligned carbon nanotubes. The carbon nanotubes were directly synthesized on silicon microstructures and these CNTs-on-microstructures were integrated to flexible polydimethylsiloxane layers. Each tactile sensor has four sensing parts and the direction of force can be detected by monitoring the increase or decrease of electrical resistance in each sensing part. High gauge factor up to 272 and fast response less than 10 ms have been experimentally verified from the presented tactile sensor. The deviated contact resistance change from the initial value was less than 3% after repeated force input of 15 mN for 180,000 cycles.

Original languageEnglish
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages37-40
Number of pages4
DOIs
StatePublished - 2013
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: 20 Jan 201324 Jan 2013

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

ConferenceIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Country/TerritoryTaiwan, Province of China
CityTaipei
Period20/01/1324/01/13

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