Direct observation of sub-threshold field emission from silicon nanomembranes

Hua Qin, Renbing Tan, Jonghoo Park, Hyun Seok Kim, Robert H. Blick

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

Excited by an energetic electron beam, field enhanced electron emission from a silicon nanomembrane is examined by using a local current probe. The experiments reveal clear transitions from conventional secondary electron emission (SEE) to sub-threshold field electron emission (SFE) and then to conventional field electron emission (FEE). An electron yield of more than 104 is obtained and a model of sub-threshold emission is verified. Ultra sensitive charge/particle detectors could be realized by implementing sub-threshold field emission in nano scale structures, where electron excitations occur within the screen depth of surface electric field.

Original languageEnglish
Article number124504
JournalJournal of Applied Physics
Volume109
Issue number12
DOIs
StatePublished - 15 Jun 2011

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