Effect of switching atmospheric conditions during crystallization on the phase evolution of solution-derived lead zirconate titanate thin films

The crystallization behavior of solution-derived lead zirconate titanate (PZT) thin films in different atmospheric environments was studied using in situ X-ray diffraction. The stability of the transient intermetallic Pt ₃Pb phase and perovskite PZT is dependent on oxygen partial pressure during crystallization. Based on the relationship between oxygen partial pressure and the resultant phase stability of intermediate phases, a new route to produce PZT thin films was developed. The new route involves switching atmospheres during crystallization and is shown to mitigate the formation of the transient intermetallic Pt₃Pb phase and to promote the perovskite PZT phase. The route evidences a new and significant variable controlling film synthesis and film microstructure.