Abstract
Passivation treatment on indium-doped Hg 0.8 Cd 0.2 Te epitaxial layers grown on p-Cd 0.96 Zn 0.04 Te substrates by molecular beam epitaxy has been performed in order to improve the surface stability of the Hg 0.8 Cd 0.2 Te layers. Room-temperature capacitance-voltage measurements clearly revealed metal-insulator-semiconductor (MIS) behavior for the Al/ZnS/passivated Hg 0.8 Cd 0.2 Te layer/Cd 0.96 Zn 0.04 Te diodes. The fast state density and the fixed charge density of the Al/ZnS/passivated Hg 0.8 Cd 0.2 Te/Cd 0.96 Zn 0.04 Te diode with a sulfur-treated Hg 0.8 Cd 0.2 Te layer were smaller than those with a chemically oxidized Hg 0.8 Cd 0.2 Te layer. The interface state density at the ZnS/sulfur-treated Hg 0.8 Cd 0.2 Te interface were low at 10 11 eV -1 cm -2 at the middle of the Hg 0.8 Cd 0.2 Te energy gap. These results indicate that the Hg 0.8 Cd 0.2 Te epilayer is significantly passivated by sulfur treatment and that the passivated Hg 0.8 Cd 0.2 Te layers can be used for Hg 1-x Cd x Te-based MIS diodes and MIS field-effect transistors.
Original language | English |
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Pages (from-to) | 209-213 |
Number of pages | 5 |
Journal | Applied Surface Science |
Volume | 180 |
Issue number | 3-4 |
DOIs | |
State | Published - 16 Aug 2001 |
Keywords
- Hg Cd Te
- Metal-insulator-semiconductor
- Sulfur passivation