Effects of point defect healing on phosphorus implanted germanium n +/p junction and its thermal stability
- Jaewoo Shim
- , Jeong Hun Shin
- , In Yeal Lee
- , Daebeom Choi
- , Jung Woo Baek
- , Jonggon Heo
- , Wonkyu Park
- , Jung Woo Leem
- , Jae Su Yu
- , Woo Shik Jung
- , Krishna Saraswat
- , Jin Hong Park
- Sungkyunkwan University
- Korea Advanced Nano Fab Center
- Kyung Hee University
- Stanford University
Research output: Contribution to journal › Article › peer-review
6
Scopus
citations