Effects of point defect healing on phosphorus implanted germanium n +/p junction and its thermal stability

Jaewoo Shim, Jeong Hun Shin, In Yeal Lee, Daebeom Choi, Jung Woo Baek, Jonggon Heo, Wonkyu Park, Jung Woo Leem, Jae Su Yu, Woo Shik Jung, Krishna Saraswat, Jin Hong Park

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