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Effects of reoxidation on band alignment in N-incorporated SiON films as a function of sequential thermal annealing in NO and N H3

  • W. J. Lee
  • , M. H. Cho
  • , K. B. Chung
  • , Y. S. Lee
  • , D. C. Kim
  • , S. Y. Choi
  • , U. I. Chung
  • , J. T. Moon

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

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