Abstract
Electrical and structural properties of indium-tin-oxide (ITO) films on flexible polymer substrates were investigated. Room temperature sputtered ITO films on polymer substrates are initially amorphous but become partially crystalline as oxygen partial pressure decreases under 1.5%. The crystallinity shows more (400) and (222) preferentially oriented textures as decreasing of oxygen pressure resulting in lower resistivity. Moreover, an interesting growth property similar to 3D growth mechanism including larger grain size and columnar-like grain structure was also observed. It is considered that the columnar-like grain structure is probably attributed to the poor surface morphology of polymer substrates Based on the experiments, we obtained high performance ITO films on a polycarbonate substrate including 3.8 × 10 -4 Ω-cm in resistivity and transmittance above 80% in the visible ranges at 0.2% oxygen partial pressure.
| Original language | English |
|---|---|
| Pages (from-to) | 201-206 |
| Number of pages | 6 |
| Journal | Materials Research Society Symposium Proceedings |
| Volume | 747 |
| State | Published - 2003 |
| Event | Crystalline Oxide-Silicon Heterostructures and Oxide Optoelectronics - Boston, MA, United States Duration: 2 Dec 2002 → 4 Dec 2002 |