Experimental and theoretical considerations on evacuation of vacuum package for FED

Jeong In Han; Min Gi Kwak; Yong Kuy Park; Sang Cheul Lim; In Kyu Lee; Kyong Ik Cho; Hyung Joun Yoo

Experimental and theoretical considerations on evacuation of vacuum package for FED

Jeong In Han, Min Gi Kwak, Yong Kuy Park, Sang Cheul Lim, In Kyu Lee, Kyong Ik Cho, Hyung Joun Yoo

Department of Chemical and Biochemical Engineering

Korea Electronics Technology Institute

Research output: Contribution to conference › Paper › peer-review

2 Scopus citations

Abstract

The vacuum levels were measured as a function of heating time and temperature and the geometrical factors such as the panel gap, the inside diameter of tube, and the tube length and the analysis of the outgassing in package were investigated. The vacuum level of a panel - 50 mm×50 mm×1.1 mm and attached the tube of Φ6 mm - was 3.0×10^-5 torr pumped for 90 minutes. The calculated vacuum level was 2.6×10^-5 torr. It was similar to the measured vacuum level. After heating the panel during pumping, the vacuum level was slightly improved to 2.8×10^-5 torr. From a RGA analysis outgassing materials were proved to be H, H₂O, CO and CO₂.

Original language	English
Pages	706-710
Number of pages	5
State	Published - 1997
Event	Proceedings of the 1997 10th International Vacuum Microelectronics Conference, IVMC'97 - Kyongju, Korea Duration: 17 Aug 1997 → 21 Aug 1997

Conference

Conference	Proceedings of the 1997 10th International Vacuum Microelectronics Conference, IVMC'97
City	Kyongju, Korea
Period	17/08/97 → 21/08/97

Cite this

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title = "Experimental and theoretical considerations on evacuation of vacuum package for FED",

abstract = "The vacuum levels were measured as a function of heating time and temperature and the geometrical factors such as the panel gap, the inside diameter of tube, and the tube length and the analysis of the outgassing in package were investigated. The vacuum level of a panel - 50 mm×50 mm×1.1 mm and attached the tube of Φ6 mm - was 3.0×10-5 torr pumped for 90 minutes. The calculated vacuum level was 2.6×10-5 torr. It was similar to the measured vacuum level. After heating the panel during pumping, the vacuum level was slightly improved to 2.8×10-5 torr. From a RGA analysis outgassing materials were proved to be H, H2O, CO and CO2.",

author = "Han, {Jeong In} and Kwak, {Min Gi} and Park, {Yong Kuy} and Lim, {Sang Cheul} and Lee, {In Kyu} and Cho, {Kyong Ik} and Yoo, {Hyung Joun}",

year = "1997",

language = "English",

pages = "706--710",

note = "Proceedings of the 1997 10th International Vacuum Microelectronics Conference, IVMC'97 ; Conference date: 17-08-1997 Through 21-08-1997",

}

TY - CONF

T1 - Experimental and theoretical considerations on evacuation of vacuum package for FED

AU - Han, Jeong In

AU - Kwak, Min Gi

AU - Park, Yong Kuy

AU - Lim, Sang Cheul

AU - Lee, In Kyu

AU - Cho, Kyong Ik

AU - Yoo, Hyung Joun

PY - 1997

Y1 - 1997

N2 - The vacuum levels were measured as a function of heating time and temperature and the geometrical factors such as the panel gap, the inside diameter of tube, and the tube length and the analysis of the outgassing in package were investigated. The vacuum level of a panel - 50 mm×50 mm×1.1 mm and attached the tube of Φ6 mm - was 3.0×10-5 torr pumped for 90 minutes. The calculated vacuum level was 2.6×10-5 torr. It was similar to the measured vacuum level. After heating the panel during pumping, the vacuum level was slightly improved to 2.8×10-5 torr. From a RGA analysis outgassing materials were proved to be H, H2O, CO and CO2.

AB - The vacuum levels were measured as a function of heating time and temperature and the geometrical factors such as the panel gap, the inside diameter of tube, and the tube length and the analysis of the outgassing in package were investigated. The vacuum level of a panel - 50 mm×50 mm×1.1 mm and attached the tube of Φ6 mm - was 3.0×10-5 torr pumped for 90 minutes. The calculated vacuum level was 2.6×10-5 torr. It was similar to the measured vacuum level. After heating the panel during pumping, the vacuum level was slightly improved to 2.8×10-5 torr. From a RGA analysis outgassing materials were proved to be H, H2O, CO and CO2.

UR - http://www.scopus.com/inward/record.url?scp=0031339754&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0031339754

SP - 706

EP - 710

T2 - Proceedings of the 1997 10th International Vacuum Microelectronics Conference, IVMC'97

Y2 - 17 August 1997 through 21 August 1997

ER -

Experimental and theoretical considerations on evacuation of vacuum package for FED

Abstract

Conference

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