Fabrication of ball-shaped atomic force microscope tips by ion-beam-induced deposition of platinum on multiwall carbon nanotubes

Yung Ho Kahng; Jinho Choi; Kwanghoon Jeong; Byong Chon Park; Dal Hyun Kim; Joon Lyou; Jae Joon Lee; Haiwon Lee; Takhee Lee; Sang Jung Ahn

doi:10.1016/j.ultramic.2009.09.011

Fabrication of ball-shaped atomic force microscope tips by ion-beam-induced deposition of platinum on multiwall carbon nanotubes

Yung Ho Kahng, Jinho Choi, Kwanghoon Jeong, Byong Chon Park, Dal Hyun Kim, Joon Lyou, Jae Joon Lee, Haiwon Lee, Takhee Lee, Sang Jung Ahn

Department of Energy and Materials Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Ball-shaped atomic force microscope (AFM) tips (ball tips) are useful in AFM metrology, particularly in critical dimension AFM metrology and in micro-tribology. However, a systematic fabrication method for nano-scale ball tips has not been reported. We report that nano-scale ball tips can be fabricated by ion-beam-induced deposition (IBID) of Pt at the free end of multiwall carbon nanotubes that are attached to AFM tips. Scanning electron microscopy and transmission electron microscopy analyses were done on the Pt ball tips produced by IBID in this manner, using ranges of Ga ion beam conditions. The Pt ball tips produced consisted of aggregated Pt nano-particles and were found to be strong enough for AFM imaging.

Original language	English
Pages (from-to)	82-88
Number of pages	7
Journal	Ultramicroscopy
Volume	110
Issue number	1
DOIs	https://doi.org/10.1016/j.ultramic.2009.09.011
State	Published - Jan 2009

Keywords

Atomic force microscopy
Carbon nanotube tip
Focused ion beam

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10.1016/j.ultramic.2009.09.011

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title = "Fabrication of ball-shaped atomic force microscope tips by ion-beam-induced deposition of platinum on multiwall carbon nanotubes",

abstract = "Ball-shaped atomic force microscope (AFM) tips (ball tips) are useful in AFM metrology, particularly in critical dimension AFM metrology and in micro-tribology. However, a systematic fabrication method for nano-scale ball tips has not been reported. We report that nano-scale ball tips can be fabricated by ion-beam-induced deposition (IBID) of Pt at the free end of multiwall carbon nanotubes that are attached to AFM tips. Scanning electron microscopy and transmission electron microscopy analyses were done on the Pt ball tips produced by IBID in this manner, using ranges of Ga ion beam conditions. The Pt ball tips produced consisted of aggregated Pt nano-particles and were found to be strong enough for AFM imaging.",

keywords = "Atomic force microscopy, Carbon nanotube tip, Focused ion beam",

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AU - Choi, Jinho

AU - Jeong, Kwanghoon

AU - Chon Park, Byong

AU - Kim, Dal Hyun

AU - Lyou, Joon

AU - Lee, Jae Joon

AU - Lee, Haiwon

AU - Lee, Takhee

AU - Jung Ahn, Sang

PY - 2009/1

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AB - Ball-shaped atomic force microscope (AFM) tips (ball tips) are useful in AFM metrology, particularly in critical dimension AFM metrology and in micro-tribology. However, a systematic fabrication method for nano-scale ball tips has not been reported. We report that nano-scale ball tips can be fabricated by ion-beam-induced deposition (IBID) of Pt at the free end of multiwall carbon nanotubes that are attached to AFM tips. Scanning electron microscopy and transmission electron microscopy analyses were done on the Pt ball tips produced by IBID in this manner, using ranges of Ga ion beam conditions. The Pt ball tips produced consisted of aggregated Pt nano-particles and were found to be strong enough for AFM imaging.

KW - Atomic force microscopy

KW - Carbon nanotube tip

KW - Focused ion beam

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Fabrication of ball-shaped atomic force microscope tips by ion-beam-induced deposition of platinum on multiwall carbon nanotubes

Abstract

Keywords

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