TY - JOUR
T1 - Fabrication of doped nano-electromechanical systems
AU - Scheible, Dominik V.
AU - Qin, Hua
AU - Kim, Hyun Seok
AU - Blick, Robert H.
PY - 2007/10
Y1 - 2007/10
N2 - We present a new generation of nano-electromechanical systems (NEMS), which are realized by doping the semiconductor base material. In contrast to the traditional approach these doped NEMS (D-NEMS) do not require a metallization layer. This makes them far lighter and hence increases resonance frequency and quality factor. Additionally, D-NEMS can be tuned from the conductive state into an insulating one. This will enable a host of new device designs, like mechanically tunable pin-junctions and nanomechanical single electron switches. We demonstrate D-NEMS fabrication and operation from the intrinsic, to the light, and to the heavy regime of doping.
AB - We present a new generation of nano-electromechanical systems (NEMS), which are realized by doping the semiconductor base material. In contrast to the traditional approach these doped NEMS (D-NEMS) do not require a metallization layer. This makes them far lighter and hence increases resonance frequency and quality factor. Additionally, D-NEMS can be tuned from the conductive state into an insulating one. This will enable a host of new device designs, like mechanically tunable pin-junctions and nanomechanical single electron switches. We demonstrate D-NEMS fabrication and operation from the intrinsic, to the light, and to the heavy regime of doping.
UR - http://www.scopus.com/inward/record.url?scp=38749098644&partnerID=8YFLogxK
U2 - 10.1002/pssr.200701186
DO - 10.1002/pssr.200701186
M3 - Article
AN - SCOPUS:38749098644
SN - 1862-6254
VL - 1
SP - 205
EP - 207
JO - Physica Status Solidi - Rapid Research Letters
JF - Physica Status Solidi - Rapid Research Letters
IS - 5
ER -