Fabrication of indium tin oxide (ITO) thin film with pre-treated sol coating

Sung Jei Hong, Jeong In Han

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22 Scopus citations

Abstract

A new pre-treated sol-coating method to fabricate an indium tin oxide (ITO) thin film is introduced in this paper. The pre-treatment sol-coating method is to form a seed layer on the substrate before spin coating of ITO sol. The pre-treatment was carried out at room temperature in order not to damage the substrate during the pre-treatment. It is effective to enhance the formation of the ITO sol film on the substrate, owing to the seed layer. The seed layer consists of ultrafine grains, which are observed at the pre-treated substrate. For the optimal pre-treatment condition, we used pre-treatment times of 24, 48, 72, and 96 hours to observe the effect on the characteristics of ITO sol film. As a result, the lowest resistance could be achieved with a pre-treatment time of 72 hours. The optical transmittance of the ITO sol film with the pre-treatment time of 72 hours exceeded 80 % at a wavelength of 400 nm. So, an ITO sol film with good electrical and optical properties could be fabricated by using the pretreatment sol coating.

Original languageEnglish
Pages (from-to)634-637
Number of pages4
JournalJournal of the Korean Physical Society
Volume45
Issue number3
StatePublished - Sep 2004

Keywords

  • Electrical resistance
  • ITO sol
  • Optical transmittance
  • Pre-treatment
  • Thin film

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