TY - GEN
T1 - Flexible Multi-Modal Sensor for Electronic Skin
AU - Jung, Minhyun
AU - Vishwanath, Sujaya Kumar
AU - Kim, Jihoon
AU - Ko, Dae Kwan
AU - Park, Myung Jin
AU - Lim, Soo Chul
AU - Jeon, Sanghun
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/7
Y1 - 2019/7
N2 - Flexible sensors have been developed over the decades due to their potential in various applications. However, recent developments in interactive user interface, healthcare device, tactile sensor, and artificial electronic skin require device with multifunctional properties such as various detection ability and good mobility. Research on such devices are still under developing. In this report, we demonstrate a flexible multimodal (pressure, temperature) sensor using embedded indium tin oxide (ITO). For the pressure sensor, the embedded ITO was adopted as a conductive layer with triple layer pyramid structure. We utilized water-soluble sacrificial layers for eco-friendly method. The triple layer pyramid-structured pressure sensor shows excellent sensitivity in dynamic range of 100 Pa to 10 kPa with high reliability of 105 cycles. For the temperature sensor, we used comb like structure with ITO. It shows negative temperature coefficient on resistance with good linearity. Due to the vertically stacked structure, we were able to ignore interface effect. This work present that the opportunity of transparent electrode towards flexible multimodal sensors that can beemployed for various flexible applications.
AB - Flexible sensors have been developed over the decades due to their potential in various applications. However, recent developments in interactive user interface, healthcare device, tactile sensor, and artificial electronic skin require device with multifunctional properties such as various detection ability and good mobility. Research on such devices are still under developing. In this report, we demonstrate a flexible multimodal (pressure, temperature) sensor using embedded indium tin oxide (ITO). For the pressure sensor, the embedded ITO was adopted as a conductive layer with triple layer pyramid structure. We utilized water-soluble sacrificial layers for eco-friendly method. The triple layer pyramid-structured pressure sensor shows excellent sensitivity in dynamic range of 100 Pa to 10 kPa with high reliability of 105 cycles. For the temperature sensor, we used comb like structure with ITO. It shows negative temperature coefficient on resistance with good linearity. Due to the vertically stacked structure, we were able to ignore interface effect. This work present that the opportunity of transparent electrode towards flexible multimodal sensors that can beemployed for various flexible applications.
UR - http://www.scopus.com/inward/record.url?scp=85071356985&partnerID=8YFLogxK
U2 - 10.1109/FLEPS.2019.8792246
DO - 10.1109/FLEPS.2019.8792246
M3 - Conference contribution
AN - SCOPUS:85071356985
T3 - FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings
BT - FLEPS 2019 - IEEE International Conference on Flexible and Printable Sensors and Systems, Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 1st IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2019
Y2 - 7 July 2019 through 10 July 2019
ER -