Frequency and voltage dependent dielectric properties of Ni-doped Ba 0.6Sr0.4TiO3 thin films

  • Mi Hwa Lim
  • , Hyun Suk Kim
  • , Nan Young Kim
  • , Ho Gi Kim
  • , Il Doo Kim
  • , Seung Eon Moon
  • , Min Hwan Kwak
  • , Han Cheol Ryu
  • , Su Jae Lee

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

Highly (100) preferred undoped and 1-5% Ni-doped Ba1-x Sr x TiO3 (BST) thin films were deposited onto MgO (100) single crystal substrate at 750°C using pulsed laser deposition. BST thin film-based interdigital capacitors (IDC) were prepared by standard photolithography process. The microwave properties of BST films were measured at 10 GHz. Ni-doped BST films showed better dielectric properties by exhibiting improved dielectric Q while retaining an appropriate capacitance tuning compared to undoped BST films. 1% Ni-doped BST film showed the maximum figure of merit of 2896.1. It is suggested that 1 mol% Ni doped BST film is an effective candidate for high performance tunable device applications.

Original languageEnglish
Pages (from-to)239-243
Number of pages5
JournalJournal of Electroceramics
Volume13
Issue number1-3
DOIs
StatePublished - Jul 2004

Keywords

  • BST
  • Interdigital capacitor
  • Microwave
  • Ni doping

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