Gradually modified conductance in the self-compliance region of an atomic-layer-deposited pt/tio2/hfalox/tin rram device

Hojeong Ryu, Sungjun Kim

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

This study presents conductance modulation in a Pt/TiO2/HfAlOx/TiN resistive memory device in the compliance region for neuromorphic system applications. First, the chemical and material characteristics of the atomic-layer-deposited films were verified by X-ray photoelectron spectroscopy depth profiling. The low-resistance state was effectively controlled by the compliance current, and the high-resistance state was adjusted by the reset stop voltage. Stable endurance and retention in bipolar resistive switching were achieved. When a compliance current of 1 mA was imposed, only gradual switching was observed in the reset process. Self-compliance was used after an abrupt set transition to achieve a gradual set process. Finally, 10 cycles of long-term potentiation and depression were obtained in the compliance current region for neuromorphic system applications.

Original languageEnglish
Article number1199
JournalMetals
Volume11
Issue number8
DOIs
StatePublished - Aug 2021

Keywords

  • Bilayer stack
  • Resistive switching
  • Self-compliance
  • Synaptic device

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