Group-Exclusive Feature Group Lasso and Applications to Automatic Sensor Selection for Virtual Metrology in Semiconductor Manufacturing

Jeongsub Choi
, Youngdoo Son
, Jihoon Kang

Department of Industrial and Systems Engineering

West Virginia University
Tech University of Korea

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

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Findings on Engineering Reported by Investigators at Dongguk University Seoul (Group-exclusive Feature Group Lasso and Applications To Automatic Sensor Selection for Virtual Metrology In Semiconductor Manufacturing)
Son, Y. D.
23/12/24
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