@inproceedings{e3ac637c35eb442bb6b9598ecb7ae666,
title = "High-mobility and high-stability ZnON thin-film transistors for next-generation display applications",
abstract = "In order to improve the performances of zinc oxynitride thin-film transistors, heat treatment conditions of ZnON semiconductors were investigated in this work. Thin film properties and the resulting TFT performances including the device stability were evaluated. High-stability ZnON devices with ultra-high field-effect mobility (UFE) values exceeding 50 cm2/Vs were achieved.",
keywords = "High mobility, High stability, Reactive sputtering, Thin film transistors, Zinc oxynitride",
author = "Kim, {Yang Soo} and Kim, {Jong Hearn} and Kim, {Hyun Suk}",
note = "Publisher Copyright: {\textcopyright} 2015 Society for Information Display.; 22nd International Display Workshops, IDW 2015 ; Conference date: 09-12-2015 Through 11-12-2015",
year = "2015",
language = "English",
series = "Proceedings of the International Display Workshops",
publisher = "International Display Workshops",
pages = "150--151",
booktitle = "22nd International Display Workshops, IDW 2015",
}
