High performance MIM devices for plastic film AM-LCD

S. J. Hong; S. K. Park; J. I. Han; W. K. Kim; M. K. Kwak; C. J. Lee; Y. H. Kim; M. J. Lee; K. S. Chung

High performance MIM devices for plastic film AM-LCD

S. J. Hong, S. K. Park, J. I. Han, W. K. Kim, M. K. Kwak, C. J. Lee, Y. H. Kim, M. J. Lee, K. S. Chung

Department of Chemical and Biochemical Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

High performance MIM devices on flexible plastic substrate were successfully fabricated without any defects such as distortion, crack, and blistering. In order to prevent these defects, newly developed design and process including buffer layer, water barrier, and low temperature post annealing (LTPA) below 150°C were applied, respectively. The uniformity and lifetime of the MIM device fabricated on 0.1 mm thick polycarbonate film were more than 92% and 10 years at applied field of 3 MV/cm, respectively.

Original language	English
Pages (from-to)	403-406
Number of pages	4
Journal	SID Conference Record of the International Display Research Conference
State	Published - 2001
Event	Asia Display/IDW 2001 - Nagoya, Japan Duration: 16 Oct 2002 → 19 Oct 2002

Keywords

Buffer layer
Flexible substrate
LTPA
MIM
Water barrier

Cite this

@article{6a1c39f2a6984960a6920f202a64c3ab,

title = "High performance MIM devices for plastic film AM-LCD",

abstract = "High performance MIM devices on flexible plastic substrate were successfully fabricated without any defects such as distortion, crack, and blistering. In order to prevent these defects, newly developed design and process including buffer layer, water barrier, and low temperature post annealing (LTPA) below 150°C were applied, respectively. The uniformity and lifetime of the MIM device fabricated on 0.1 mm thick polycarbonate film were more than 92% and 10 years at applied field of 3 MV/cm, respectively.",

keywords = "Buffer layer, Flexible substrate, LTPA, MIM, Water barrier",

author = "Hong, {S. J.} and Park, {S. K.} and Han, {J. I.} and Kim, {W. K.} and Kwak, {M. K.} and Lee, {C. J.} and Kim, {Y. H.} and Lee, {M. J.} and Chung, {K. S.}",

year = "2001",

language = "English",

pages = "403--406",

journal = "SID Conference Record of the International Display Research Conference",

issn = "1083-1312",

publisher = "Society for Information Display",

note = "Asia Display/IDW 2001 ; Conference date: 16-10-2002 Through 19-10-2002",

}

TY - JOUR

T1 - High performance MIM devices for plastic film AM-LCD

AU - Hong, S. J.

AU - Park, S. K.

AU - Han, J. I.

AU - Kim, W. K.

AU - Kwak, M. K.

AU - Lee, C. J.

AU - Kim, Y. H.

AU - Lee, M. J.

AU - Chung, K. S.

PY - 2001

Y1 - 2001

N2 - High performance MIM devices on flexible plastic substrate were successfully fabricated without any defects such as distortion, crack, and blistering. In order to prevent these defects, newly developed design and process including buffer layer, water barrier, and low temperature post annealing (LTPA) below 150°C were applied, respectively. The uniformity and lifetime of the MIM device fabricated on 0.1 mm thick polycarbonate film were more than 92% and 10 years at applied field of 3 MV/cm, respectively.

AB - High performance MIM devices on flexible plastic substrate were successfully fabricated without any defects such as distortion, crack, and blistering. In order to prevent these defects, newly developed design and process including buffer layer, water barrier, and low temperature post annealing (LTPA) below 150°C were applied, respectively. The uniformity and lifetime of the MIM device fabricated on 0.1 mm thick polycarbonate film were more than 92% and 10 years at applied field of 3 MV/cm, respectively.

KW - Buffer layer

KW - Flexible substrate

KW - LTPA

KW - MIM

KW - Water barrier

UR - http://www.scopus.com/inward/record.url?scp=0035782987&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0035782987

SN - 1083-1312

SP - 403

EP - 406

JO - SID Conference Record of the International Display Research Conference

JF - SID Conference Record of the International Display Research Conference

T2 - Asia Display/IDW 2001

Y2 - 16 October 2002 through 19 October 2002

ER -

High performance MIM devices for plastic film AM-LCD

Abstract

Keywords

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