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High performance TaYOx-based MIM capacitors

  • C. Mahata
  • , M. K. Bera
  • , M. K. Hota
  • , T. Das
  • , S. Mallik
  • , B. Majhi
  • , S. Verma
  • , P. K. Bose
  • , C. K. Maiti
  • Institute of Science Tokyo
  • Indian Institute of Technology Kharagpur
  • Institute of Physics Bhubaneswar
  • Jadavpur University

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

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