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Highly conducting, transparent, and flexible indium oxide thin film prepared by atomic layer deposition using a new liquid precursor Et2inN(SiMe3)2

  • Wan Joo Maeng
  • , Dong Won Choi
  • , Kwun Bum Chung
  • , Wonyong Koh
  • , Gi Yeop Kim
  • , Si Young Choi
  • , Jin Seong Park

Research output: Contribution to journalArticlepeer-review

63 Scopus citations

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