Impact of buffer layer on atomic layer deposited TiAlO alloy dielectric quality for epitaxial-GaAs/Ge device application

  • G. K. Dalapati
  • , C. K. Chia
  • , C. Mahata
  • , S. Krishnamoorthy
  • , C. C. Tan
  • , H. R. Tan
  • , Chinmay Kumar Maiti
  • , Dongzhi Chi

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

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