Impact of plasma nitridation method on Vfb shift and the reliability of CMOSFETs

Dong Chan Kim, Mann Ho Cho, Jin Mwa Heo, Bon Young Koo, Chul Sung Kim, Young Jin Noh, Ji Hyun Kim, Kwun Bum Chung, Yugyun Shin, Dae Won Moon, U. In Chung, Joo Tae Moon

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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