Impact of plasma nitridation method on Vfb shift and the reliability of CMOSFETs

  • Dong Chan Kim
  • , Mann Ho Cho
  • , Jin Mwa Heo
  • , Bon Young Koo
  • , Chul Sung Kim
  • , Young Jin Noh
  • , Ji Hyun Kim
  • , Kwun Bum Chung
  • , Yugyun Shin
  • , Dae Won Moon
  • , U. In Chung
  • , Joo Tae Moon

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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