Improved electrical conduction properties in unintentionally-doped ZnO thin films treated by rapid thermal Annealing

Youngmin Lee, Choeun Lee, Eunhee Shim, Eiwhan Jung, Jinyong Lee, Deuk Young Kim, Sejoon Lee, Dejun Fu, Hyung Do Yoon

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

The effects of thermal treatments on the electrical conduction properties for the unintentionallydoped ZnO thin films were investigated. Despite the decreased carrier density in the annealed ZnO thin films, the conductivity was increased because the contribution of the effective carrier mobility to the conductivity of the unintentionally-doped ZnO thin films is greater than that of the carrier density. The resistivity exponentially decreased with increasing RTA temperature, and this result was confirmed to come from the enhanced effective carrier-mobility, which originated from the increased crystallite size in the annealed ZnO thin films.

Original languageEnglish
Pages (from-to)2774-2777
Number of pages4
JournalJournal of the Korean Physical Society
Volume59
Issue number4
DOIs
StatePublished - 14 Oct 2011

Keywords

  • Conductivity
  • Effective mobility
  • Rapid thermal annealing
  • Unintentionally-doped ZnO

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