Improved field effect mobility and stability of indium-free oxide thin film transistor by metal capping layer

Ji Min Park, Ho Hyun Nahm, Hyun Suk Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work, to get better electrical properties, metal capping layer and lift-off lithography process of a new type of Indium-free amorphous thin films and associated thin-film transistors (TFTs) were investigated. As a result, optimized TFTs showed high mobility (>30cm2/Vs) and excellent stability than conventional InZnO TFTs.

Original languageEnglish
Title of host publication26th International Display Workshops, IDW 2019
PublisherInternational Display Workshops
Pages563-566
Number of pages4
ISBN (Electronic)9781713806301
StatePublished - 2019
Event26th International Display Workshops, IDW 2019 - Sapporo, Japan
Duration: 27 Nov 201929 Nov 2019

Publication series

NameProceedings of the International Display Workshops
Volume2
ISSN (Print)1883-2490

Conference

Conference26th International Display Workshops, IDW 2019
Country/TerritoryJapan
CitySapporo
Period27/11/1929/11/19

Keywords

  • Amorphous oxide semiconductors
  • BaSnO3
  • High mobility
  • Stability
  • Thin film transistors

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