TY - JOUR
T1 - Indium tin oxide (ITO) thin film fabricated by indium-tin-organic sol including ITO nanoparticle
AU - Hong, Sung Jei
AU - Han, Jeong In
PY - 2006/8
Y1 - 2006/8
N2 - In this paper, indium tin oxide (ITO) thin film was fabricated by indium-tin-organic sol including ITO nanoparticle, and optical transmittance was characterized. ITO nanoparticle was designed to dope 10 wt.% SnO2 into In2O3 lattice, and was synthesized under low temperature not exceeding 300 °C in order to make ultrafine sized particle. As a result, the synthesized ITO nanoparticle showed ultrafine size about 5 nm and high specific surface area of 117 m2/g. Also, (2 2 2) preferred orientation was observed from X-ray diffracted peak. Then, using the particles and indium-tin-organic sol, ITO thin film was fabricated. The indium-tin-organic sol was made using organic solution in which indium and tin acetic reagents were dissolved into an organic solvent. The ITO nanoparticle was included into indium-tin-organic sol in order to deposit ITO sol thin film by spin coating. The ITO mixture sol was spin-coated on a glass substrate of which area was 7 × 7 cm, and heat-treated at 500 °C. As a result, the optimized ITO sol-gel thin film could be successfully fabricated with good optical transmittance over 83% and electrical resistance less than 7 × 103 Ω by including the 0.6 wt.% ITO nanoparticle into the ITO sol.
AB - In this paper, indium tin oxide (ITO) thin film was fabricated by indium-tin-organic sol including ITO nanoparticle, and optical transmittance was characterized. ITO nanoparticle was designed to dope 10 wt.% SnO2 into In2O3 lattice, and was synthesized under low temperature not exceeding 300 °C in order to make ultrafine sized particle. As a result, the synthesized ITO nanoparticle showed ultrafine size about 5 nm and high specific surface area of 117 m2/g. Also, (2 2 2) preferred orientation was observed from X-ray diffracted peak. Then, using the particles and indium-tin-organic sol, ITO thin film was fabricated. The indium-tin-organic sol was made using organic solution in which indium and tin acetic reagents were dissolved into an organic solvent. The ITO nanoparticle was included into indium-tin-organic sol in order to deposit ITO sol thin film by spin coating. The ITO mixture sol was spin-coated on a glass substrate of which area was 7 × 7 cm, and heat-treated at 500 °C. As a result, the optimized ITO sol-gel thin film could be successfully fabricated with good optical transmittance over 83% and electrical resistance less than 7 × 103 Ω by including the 0.6 wt.% ITO nanoparticle into the ITO sol.
KW - Electrical resistance
KW - ITO
KW - Nanoparticle
KW - Optical transmittance
KW - Sol
KW - Thin film
UR - http://www.scopus.com/inward/record.url?scp=33746737560&partnerID=8YFLogxK
U2 - 10.1016/j.cap.2006.01.041
DO - 10.1016/j.cap.2006.01.041
M3 - Article
AN - SCOPUS:33746737560
SN - 1567-1739
VL - 6
SP - e206-e210
JO - Current Applied Physics
JF - Current Applied Physics
IS - SUPPL. 1
ER -