Influence of gate recess structure on the DC characteristics of 0.1-μm metamorphic HEMTs

Jung Hun Oh, Young Hyun Back, Seok Gyu Choi, Sung Woon Moon, Bok Hyung Lee, Jin Koo Rhee, Sam Dong Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Effects of the gate recess structures on the DC performances were investigated in 0.1-μm metamorphic high-electron-mobility transistors. Narrow gate recess structure showed significantly enhanced DC characteristics compared to wide gate recess structure in terms of drain-source saturation current increasing from 440 to 710 mA/mm and extrinsic transconductance increasing from 420 to 910 mS/mm. We propose that the observed variations in DC characteristics are due to the deep-level acceptor-type interface defects formed between the silicon-nitride passivation layer and the Schottky barrier layer. We performed hydrodynamic model simulation to verify the proposed mechanism, and the calculated result showed a good agreement with the experimental observation. copyright The Electrochemical Society.

Original languageEnglish
Title of host publicationState-of-the-Art Program on Compound Semiconductors XLIV
PublisherElectrochemical Society Inc.
Pages71-77
Number of pages7
Edition5
ISBN (Electronic)9781566774420
DOIs
StatePublished - 2006
EventState-of-the-Art Program on Compound Semiconductors XLIV 209th Electrochemical Society Meeting - Denver, CO, United States
Duration: 7 May 200612 May 2006

Publication series

NameECS Transactions
Number5
Volume2
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

ConferenceState-of-the-Art Program on Compound Semiconductors XLIV 209th Electrochemical Society Meeting
Country/TerritoryUnited States
CityDenver, CO
Period7/05/0612/05/06

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