Interfacial reaction of atomic-layer-deposited HfO2 film as a function of the surface state of an n-GaAs (100) substrate

  • C. Y. Kim
  • , S. W. Cho
  • , M. H. Cho
  • , K. B. Chung
  • , C. H. An
  • , H. Kim
  • , H. J. Lee
  • , D. H. Ko

Research output: Contribution to journalArticlepeer-review

24 Scopus citations

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