Low-temperature sol-gel derived ultra-flexible metal-oxide thin-film-transistors and their applications

Jeong Wan Jo, Jae Sang Heo, Kyung Tae Kim, Jaehyun Kim, Myung Gil Kim, Sung Kyu Park

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Solution-processed metal-oxide thin-film transistors (TFTs) were fabricated for flexible integrated circuits. As gate dielectric layer, a transparent insulating oxide, ZAO (Zirconium incorporated aluminum oxide) has been employed instead of using pristine AlOx (Aluminum oxide). Using the ZAO gate dielectric, field-effect mobility of 6.21 cm2/Vs and hysteresis-free property have achieved by improving the interface between the gate dielectric and the IGZO (Indium gallium zinc oxide) semiconductor layer. For the surface modification, a heterogeneous ZAO gate dielectric has been used. With the IGZO TFTs employing ZAO gate dielectric, an ultra-flexible 7-stage ring-oscillator array was fabricated.

Original languageEnglish
Title of host publicationThin Film Transistors 13, TFT 13
EditorsY. Kuo
PublisherElectrochemical Society Inc.
Pages123-126
Number of pages4
Edition10
ISBN (Electronic)9781607687276, 9781607687672, 9781607687689, 9781607687696, 9781607687702, 9781607687719, 9781607687726, 9781607687733, 9781607687740, 9781607687757, 9781607687771, 9781607687788, 9781607687795, 9781607687801, 9781607687818, 9781607687825, 9781607687832, 9781607687849, 9781607687856, 9781607687863, 9781607687887, 9781607687894, 9781607687900, 9781607687917, 9781607687924, 9781607687931, 9781607687948, 9781607687955, 9781607687962, 9781607687979, 9781607687986, 9781607687993, 9781607688006, 9781607688013, 9781607688020, 9781607688037
DOIs
StatePublished - 2016
EventSymposium on Thin Film Transistors 13, TFT 2016 - PRiME 2016/230th ECS Meeting - Honolulu, United States
Duration: 2 Oct 20167 Oct 2016

Publication series

NameECS Transactions
Number10
Volume75
ISSN (Print)1938-6737
ISSN (Electronic)1938-5862

Conference

ConferenceSymposium on Thin Film Transistors 13, TFT 2016 - PRiME 2016/230th ECS Meeting
Country/TerritoryUnited States
CityHonolulu
Period2/10/167/10/16

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