Magnetic properties of Mn+-implanted and annealed Si1-xGex thin films grown on p-Si (100) substrates

Y. H. Kwon, T. W. Kang, Y. Shon, H. Y. Cho, H. C. Jeon, Y. S. Park, D. U. Lee, T. W. Kim, D. J. Fu, X. J. Fan

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Abstract

Mn+-implanted and annealed Si1-xGex thin films grown on p-Si (100) substrates were formed with the goal of producing (Si1-xGex)1-yMny with a high ferromagnetic transition temperature (Tc). The double-crystal X-ray rocking curves and transmission electron microscopy images showed that the Mn-implanted and annealed Si1-xGex thin films were single crystalline. The magnetization curves as functions of the magnetic field clearly showed that ferromagnetism existed in the Mn+-implanted and annealed Si1-xGex thin films, and the magnetization curves as functions of the temperature showed that the Tc value was above 300 K. These results indicate that the formed (Si1-xGex)1-yMny thin films hold promise for potential applications in Si-based spintronic devices operating at room temperature.

Original languageEnglish
Pages (from-to)161-164
Number of pages4
JournalSolid State Communications
Volume147
Issue number5-6
DOIs
StatePublished - Aug 2008

Keywords

  • A. Semiconductor
  • C. Impurities in semiconductors

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