@inproceedings{c858534a87c0469daa5ac7ef519f70ab,
title = "Microwave assisted amorphous oxide thin-film transistors with polymer gate dielectrics",
abstract = "In this work, a-IGZO TFTs were fabricated at room temperature by the synergistic combination of microwave annealing and polymer gate dielectrics. a-IGZO TFTs were successfully fabricated at room temperature and show good electrical properties and stability.",
keywords = "Low-temperature, Microwave annealing, Polymer dielectric",
author = "Jang, {Seong Cheol} and Kihyeon Bae and Lee, {Kyung Jin} and Kim, {Hyun Suk}",
note = "Publisher Copyright: {\textcopyright} 2019 ITE and SID.; 26th International Display Workshops, IDW 2019 ; Conference date: 27-11-2019 Through 29-11-2019",
year = "2019",
language = "English",
series = "Proceedings of the International Display Workshops",
publisher = "International Display Workshops",
pages = "554--556",
booktitle = "26th International Display Workshops, IDW 2019",
}